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Home > Products > Motion Control > Piezo-Motion Units > Ambient Temperature · Carrier.L7550.XY Large-range piezoelectric scanning table

Ambient Temperature · Carrier.L7550.XY Large-range piezoelectric scanning table

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Piezoelectric · Large Travel Linear Motion— Carrier.L7550.XY
Piezoelectric motion@RT solutions — “.Carrier Series“ Large Travel Carrier - Precision Optics, Semiconductor Characterization
Piezo-Linear Stage with compact shape and no compromise on power
performance; while guaranteeing a premium price space.
 
Product Features
• XY-directional range 75 mm × 50 mm
• Smallest size of about 20 nm
• Maximum velocity 20 mm/s
• Closed-loop sensing with 100 nm / 10 nm spatial resolution
• Guaranteed through-hole of 85 mm × 65 mm for full range of motion
• Supports no magnetism (.NM) & ultra-high vacuum (.UHV)
• Main body aluminum alloy (hard oxide blackened)
 
2D - Dimensional drawing
Carrier.L7550.XY Large-range piezoelectric scanning table —Specification

Optional Versions ?

Default

.NM

.HV

.UHV

 

 

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

Orientation of

1         movement

X，Y

2         Bottom size * height

250 mm × 200 mm ×  30 mm

Required installation

3         space

 

325 mm × 250 mm

4         Effective perforation

85 mm × 65 mm

5         Main Material

Aluminum alloy

6         Cables & Connectors

Standard shielded cable

D-Sub 9 Connector

Kapton enameled Wire，

PEEK-2mm Pin

7         Operating temperature

10 – 40 °C

Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form)

8         Travel

75 mm × 50 mm

9         MAX. Velocity

~ 20 mm/s

10        Min. Step

～ 30 nm

11        Drive Frequency

Max. 20 kHz （Super quiet movement）

12        Maximum load

2 kg

13        Full-travel pitch/yaw

0.8 mrad

傳感精度

14        Position Sensing Type

- Resistance type sensing ( .R )

- Optical scale sensing ( .O )

15        Position sensing range

75 mm × 50 mm

16       Position sensing resolution

- Resistance type sensing ( .R ), 100-200 nm

- Optical scale sensing ( .O ), 10 nm ( default )，1nm ( option )