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Home > Products > Motion Control > Piezo-Motion Units > Ambient Temperature · Carrier.S200.XY Large-range piezoelectric scanning table

Ambient Temperature · Carrier.S200.XY Large-range piezoelectric scanning table

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Piezoelectric · Large scale scanning motion— Carrier.S200.XY
Piezoelectric motion@RT solutions — “.Carrier Series“ Large scale scanning carrier - Precision Optics, Semiconductor Characterization
Piezo-Linear Stage with compact shape and no compromise on power
performance; while guaranteeing a premium price space.
Product Features
• Two-dimensional XY scanning motion 200 um × 200 um
• Closed-loop positioning accuracy better than 1 nm
• Maximum load 500 g
• Customized solutions for optical microscopy-super-resolution
• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
 
2D - Dimensional drawing
Carrier.S200.XY Large-range piezoelectric scanning table —Specification

Optional Versions ?

Default

 

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

1            Bottom size * height

180 mm × 150 mm × 20 mm

2            Main Material

Aluminum alloy

3            Hollow perforation

80 mm × 60 mm

4            Travel

200 um × 200 um

5            Closed-loop resolution

< 1nm

6            Maximum load

500 g

7            Closed-loop sensors

Capacitive

8            Capacitance accuracy

0.3 nm

9            Piezoelectric capacitance (X, Y)

6.5 uF

10           Operating temperature

15 – 40 °C

11           Quality

1 kg

12           Installation

Automatic compatibility of threaded holes

Carrier.L7550.XY