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Home > Products > Motion Control > Piezo-Motion Units > Ambient Temperature · Carrier.S100-OB.Z Objective autofocus scanning table

Ambient Temperature · Carrier.S100-OB.Z Objective autofocus scanning table

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Piezoelectric · Large-range piezoelectric scanning — Carrier.S100-OB.Z
Piezoelectric motion@RT solutions — “.Carrier Series“ Large Travel Scanning - Precision Optics, Semiconductor Characterization
Piezo-Linear Stage with compact shape and no compromise on power performance;
while guaranteeing a premium price space.
Product Features
• Z-directional motion range of 200 um
• Fastest stabilization time (90% position stabilization) within 20ms
• Closed-loop positioning accuracy better than 1 nm
• Maximum load 500 g
• Controller compatible with MultiFields? Motion Controller - Archimedes Series
• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
2D - Dimensional drawing
Carrier.S100-OB.Z Objective autofocus scanning table — Specification

Optional Versions ?

Default

 

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

1           Orientation of movement

Z axis

2           Travel range

100 um

3           Linearity

0.02%

4           Pitch / Yaw

30 urad

5           Position encoder

Resistive Sensor

6           Sensor noise

0.3 nm

7           Z axis resolution, open-loop

0.1 nm

8           Stabilize time (90% Position)

15 ms

9           Rigidity

0.4 N/um

10          Resonant frequency (no load)

650 Hz

11          Resonant frequency (150g load)

275 Hz

12          Weight

270 g

13          Mainbody

Stainless steel 304，Aluminum alloy